| 摘要 |
PCT No. PCT/EP93/02414 Sec. 371 Date Apr. 19, 1994 Sec. 102(e) Date Apr. 19, 1994 PCT Filed Sep. 7, 1993 PCT Pub. No. WO94/06160 PCT Pub. Date Mar. 17, 1994An electromechanical positioning device to be used for positioning, for example, a probe-tip (12) in a scanning tunneling microscope, an electron emitter in a field electron gun, a mirror in an interferometer etc. comprises a low-mass support (10) as a moving drive means. The support, which is mounted to be frictionally movable in an electromechanical movement activating means, can be moved comparatively fast owing to its low mass and very precisely because its response to the movement force is controlled by sawtooth control pulses, preferably via a piezo-mechanical structure.
|
