| 摘要 |
PURPOSE: To improve the reliability of beam position detection by providing means for easily diagnosing the failure or deterioration of a beam produce detector using synchrotron radiation. CONSTITUTION: In a mirror chamber 102 an X-ray mirror 105 is housed to expand a beam of synchrotron radiation in a y-direction and held with a mirror surface 106 which is moved by a drive mechanism 108 to control the position and attitude of the mirror 105. A beam position detector 107 is integrated with the support 106 and has two photoelectric elements to receive the beam of synchrotron radiation at a position not obstructing an exposure section. The output of each element of the detector 107 is applied to a controller 109 which computes the beam position and strength of the synchrotron emission and beam profile, etc., and diagnoses the functions of the detector such as failure and deterioration. |
