| 摘要 |
PURPOSE: To provide a transfer device, which holds reliably a work and can transfer the work without generating such a problem as a positional deviation of the work is generated at the time of transfer of the work. CONSTITUTION: A transfer device for transferring a work is provided with drive sources 25 and 26, arms 34 and 36, which are respectively driven by these drive sources 25 and 26, and an electrostatic chuck 41, which is provided on these arms 34 and 36 and holds the work by an electrostatic force. |
