Scanning atomic force microscope

摘要

A scanning atomic force microscope includes a probe arranged near a sample surface to oppose the sample surface, a support device for supporting the prove, a moving mechanism for moving the probe relative to the sample, and a signal detector for detecting a signal corresponding to a structure of the sample surface obtained by the probe. The signal detector includes a laser beam oscillator for oscillating a laser beam, and a laser beam receiving device for receiving the laser beam which is emitted from the laser beam oscillator and is reflected by the support device. The scanning atomic force microscope is further provided with a laser beam output device which has a function of controlling the laser beam oscillator to discontinuously emit the laser beam.