STATION FOR LOADING AND UNLOADING FOR SEMICONDUCTOR PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To ensure charging proceeding from the transporting containers to a semiconductor processing installation in a clean room by engaging the manipulating device which is arranged in the semiconductor processing installation into the transportation containers through charging openings. SOLUTION: A charging opening 13 which can be closed by a closure 12 is formed in a shield 11. A transporting container 6 is engaged or coupled with the closure 12 by way of a container cover 15 thereof. A suction element 16 is incorporated in the closure 12 so as to enable the above coupling by an engagement action with a friction which is generated when one of platforms 7 is horizontally moved toward a wall element 2. Loading and unloading are carried out on a planar surface 10 by engaging the manipulating device 22 arranged in a clean room region of the semiconductor processing installation through the charging opening 13.