| 摘要 |
PURPOSE: To efficiently obtain the finish grinding of a ceramic work piece such as Si3N4 and the like while the occurrence of cracks, deformation and deteriorated layers is being prevented. CONSTITUTION: In a humidified environment or underwater where the temperature is equal to or more than 40 deg. but less than 300 deg., and air pressure is more than atmospheric pressure, a grinding wheel 6 formed out of abrasive grains easily reactive against a work piece W is brought into contact with the workpiece made of Si3N4 with pressure, let a chemical reaction take place in the surface layer of the workpiece by letting a relative motion be caused between the grinding wheel 6 and the workpiece W, and the layer where the chemical reaction took place, is removed thereafter. |
