发明名称 Laminated complementary thin film transistor device with improved threshold adaptability
摘要 A combination of a lower thin film transistor formed on an insulating substrate and an upper thin film transistor laminated over the lower transistor has a lower channel formed in the lower transistor, an upper channel formed in the upper transistor, a lower gate electrode disposed under the lower channel, an intermediate gate electrode disposed between the lower channel and the upper channel, and an upper gate electrode disposed over the upper channel.
申请公布号 US5567959(A) 申请公布日期 1996.10.22
申请号 US19940356558 申请日期 1994.12.15
申请人 NEC CORPORATION 发明人 MINEJI, AKIRA
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L21/8238;H01L27/06;H01L27/092;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L27/108;H01L29/76;H01L27/01 主分类号 G02F1/136
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