| 摘要 |
PURPOSE: To reduce the time necessary for changing the kind of a substrate to be worked, by installing a base plate wherein a plurality of holes are formed on the upper surface, and a retainer which has a plurality of positioning pins, is detachably fixed to the base plate by inserting the positioning pins in the holes, and retains the lower surface of the substrate. CONSTITUTION: A retaining plate 17 is arranged on a base plate 15. Backup pins 26 are disposed upright in retaining plate holes 18 penetrating the retaining plate 17, so as to be able to be extracted. The retaining plate holes 18 are formed in the directions of X and Y, with specific intervals on the retaining plate 17. A flange 27 is formed at a specific position from the upper end surface of the backup pin 26. The frange 27 is engaged with the upper surface of the retaining plate 17. The part lower than the flange 27 is inserted in a hole 16. The backup pin 26 is disposed upright so as to obtain a specific height from the retaining plate 17. Two positioning pins 28 are planted on the lower surface of the retaining plate 17. The pins 28 are inserted in the holes 16 bored in the base plate 15 and set at specific positions. |
