| 摘要 |
<p>PURPOSE: To correct the height of a sample into a high plane without being affected by dusts or the like. CONSTITUTION: The upper surfaces of projected elements 2, 11 and 12 are formed into the same plane and a sample 6 is born by the elements 2, 11 and 12. The height of the upper surfaces of first and second static pressure sealing parts 13 and 14 is formed into a height slightly lower than that of the upper surfaces of the elements 2 and fine gaps 23 and 24 are formed between the sealing parts 13 and 14 and the sample 6. The gaps 23 and 24 serve as a strong registor and lessen the amount of the air, which flows in a vacuum suction part 3 at the time of vacuum suction. A positive pressure air 22 puts an annular groove 15 in the state of a positive pressure and prevents the air from entering the gap 24 from the outside. The gap 23 serves as a strong resistor to the positive pressure air and lessens the positive pressure air which flows in the vacuum suction part 3.</p> |
