发明名称 CELL ARRAY LAYOUT METHOD OF NONVOLATILE MEMORY DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To facilitate a contact hole forming process and reduce chip size, by uniformly maintaining active region in overall cell by forming a second active line on an active region for the contact hole. SOLUTION: A main source line is connected to a source line 35 through a common contact hole 39, and a plurality of first active lines 41 are positioned under and parallel to bit lines, while including a memory cell, and a source, a drain and a channel of a selected transistor. Each first field separating line 49 is positioned parallel to and in the intermediary of each first active line 41. A second active line 37 is connected perpendicular to the source line 35, and positioned parallel to and under the main source line. Each second field separating line 51 is formed parallel to and in the intermediary of each first active line 41 and each second active line 37.</p>
申请公布号 JPH08279604(A) 申请公布日期 1996.10.22
申请号 JP19960052906 申请日期 1996.03.11
申请人 SAMSUNG ELECTRON CO LTD 发明人 YANAGI SHIYOUGEN;KIN TAKEHIDE
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824 主分类号 H01L21/8247
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