| 摘要 |
PURPOSE: To provide a hydrogen sensor probe which has a simple sensor structure and at the same time can be miniaturized, and further can stably and accurately measure hydrogen concentration and its manufacturing method. CONSTITUTION: A hydrogen sensor probe is provided with a solid electrolyte 2 with a proton conductivity, a reference electrode 1 buried in the interior of the solid electrolyte 2, a measurement electrode 3 formed on the surface of the solid electrolyte 2, and a solid reference substance 4 consisting of a metal deposited from the solid electrolyte 2 and its metal hydride by applying a decomposition voltage in which reference electrode 1 becomes a negative electrode between the reference electrode 1 and the measurement electrode 3. The solid reference substance 4 is formed by locally decomposing the solid electrolyte 2 by applying the decomposition voltage to deposit the constitution metal and allows the metal to react with a proton traveling to the reference electrode 1 to deposit a metal hydride. |
