发明名称 |
Method for minimizing peeling at the surface of spin-on glasses |
摘要 |
A gas discharge through nitrous oxide or nitrogen is used to remove polymeric deposits that form on the surface of a layer of a spin-on glass that was etched in an atmosphere of carbon-fluorine compounds. Removal of the polymeric deposit greatly improves adhesion to the spin-on glass layer of subsequently deposited layers. The removal is accomplished without increasing any tendency of the spin-on glass layer to absorb moisture.
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申请公布号 |
US5567658(A) |
申请公布日期 |
1996.10.22 |
申请号 |
US19940299269 |
申请日期 |
1994.09.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
WANG, CHIN-KUN;CHANG, CHENG-CHENG |
分类号 |
C23C16/02;H01L21/311;(IPC1-7):H05H1/00;H01L21/469;H01L21/475 |
主分类号 |
C23C16/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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