| 摘要 |
<p>PURPOSE: To take correct gas flow measurement by measuring a flow by a hot-wire flow meter in the case where pressure fluctuation is caued in a fluid even if a flow is in a large-flow region of more than a specified value. CONSTITUTION: A fluid F which flows in a flow meter main body 19 is divided into a fluid which flows into a flow meter part 37 and a fluid which flows into a flow sensor inlet 38 by a partition plate 29. In the case of a fluid which flows into the flow meter part 37, pressure vibration generated in a fluid is measured from a differential pressure generated on both sides of an outlet of a measuring nozzle 11, the frequency measurement of pressure vibration is taken, and a flow is computed from the obtained frequency. In the case of a small flow of 3-170 litre/h, the flow is measured by an IC flow sensor mounted on a flow sensor inlet 38. On the other hand, a fluctuation determining means determines whether there is fluctuation in the measured flow or not. If yes, even if the flow is more than a specified value, a flow is measured by the IC flow sensor.</p> |
