PRODUCTION OF MAGNETO-OPTICAL RECORDING MEDIUM

摘要

PURPOSE: To produce a magneto-optical recording medium having high coercive force without heating substrates at the time of film formation by forming a PtCo alloy film of film forming particles having kinetic energy of magnitude of 15 to 30ev. CONSTITUTION: A Pt-25at.% Co alloy target having a diameter of 7 inches is used as a target and sputtering is executed with gaseous Ar. The film is formed to a thickness of about 150A and the sputtering is executed while the substrate is cooled with water during sputtering. The result obtd. by analyzing the resulted film compsn. with fluorescent X-rays reveals that there is not much deviation from the target compsn. and Pt-25at.% Co is attained. The curling loop at a wavelength of 400nm of the formed film is as shown by Fig. Hc=1.2 KOe,θk=0.36deg,θkr /θks =1.0 are obtd. and the good perpendicularly magnetized film is obtd.