| 摘要 |
PURPOSE: To provide a gas sensor excellent in selectivity of gas and exhibiting low dependency on the temperature and humidity with high productivity by arranging a plurality of gas-sensitive element having substantially identical gas-sensitive characteristics and temperature/humidity dependency on a substrate and covering a part of the elements with a catalyst layer exhibiting selective gas permeability. CONSTITUTION: Gas-sensitive elements (a), (b) having identical composition are formed on a same plane and a heater for the element is disposed on the rear surface. Since the elements (a), (b) have substantially identical temperature/ humidity dependency, temperature/humidity dependency of the element (b) is compensated by that of the element (a) and the output Vout is substantially not affected by the temperature/humidity. Furthermore, the excellent selectivity of the output Vout is realized by a catalyst layer exhibiting selective gas permeability provided covering the element (b). The gas-sensitive element principally comprisesα-iron oxide and a composite oxide, comprising titanium and one kind or more of alkaline earth metal, carries a catalyst comprising one kind or more of gold, palladium, platinum or rhodium selected depending on the required gas-sensitive characteristics.
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