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发明名称
PLASMA GENERATING DEVICE
摘要
申请公布号
JPH08274067(A)
申请公布日期
1996.10.18
申请号
JP19950072754
申请日期
1995.03.30
申请人
HITACHI LTD
发明人
YOKOGAWA KATANOBU;MIZUTANI TATSUMI
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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