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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH08274055(A)
申请公布日期
1996.10.18
申请号
JP19950071507
申请日期
1995.03.29
申请人
SHARP CORP
发明人
ONO HITOSHI
分类号
B08B13/00;B08B3/00;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B13/00
代理机构
代理人
主权项
地址
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