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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08274168(A)
申请公布日期
1996.10.18
申请号
JP19950074260
申请日期
1995.03.30
申请人
SEIKO EPSON CORP
发明人
KOKUBU TAKASHI
分类号
H01L21/285;H01L21/288;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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