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发明名称
TEST METHOD OF SEMICONUCTOR DEVICE
摘要
申请公布号
JPH08274139(A)
申请公布日期
1996.10.18
申请号
JP19950072929
申请日期
1995.03.30
申请人
NEC CORP
发明人
TOGAWA RYUICHI
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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