METHOD FOR FORMING SILICON NITRIDE THIN-FILM,申请号JP19950073941-传众专利搜索

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发明名称	METHOD FOR FORMING SILICON NITRIDE THIN-FILM
摘要
申请公布号	JPH08274089(A)	申请公布日期	1996.10.18
申请号	JP19950073941	申请日期	1995.03.30
申请人	KAWASAKI STEEL CORP	发明人	KATAGIRI TOMOHARU
分类号	H01L21/205;H01L21/31;H01L21/318;(IPC1-7):H01L21/318	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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