| 摘要 |
PURPOSE: To provide an alignment mark, in which grooves that make up the alignment mark are not buried and with which precise alignment can be done in forming an aluminum alloy film by a high temperature aluminum sputter/ reflow method. CONSTITUTION: An alignment main body that is made up of cross-shaped grooves 13 formed on a substrate 12 and square holes 14 of the sizes of the cross-shaped grooves 13 or less with the spacing of 0.1μm-2.0μm around the cross-shaped grooves 13 are arranged at high density.
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