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发明名称
VAPOR GROWTH METHOD AND DEVICE
摘要
申请公布号
JPH08274033(A)
申请公布日期
1996.10.18
申请号
JP19950078558
申请日期
1995.04.04
申请人
HITACHI LTD
发明人
AOYANAGI RYOICHI
分类号
C23C16/44;C23C16/455;C23C16/458;C23C16/46;H01L21/20;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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