| 摘要 |
<p>PURPOSE: To provide a variable capacitance capacitor large in a capacitance change rate and cheap in cost. CONSTITUTION: A reference electrode 4 is arranged and fixed to a bottom surface 5 of a recess part 8 of a substrate 3, and the reference electrode 4 and an electrode surface 11 are faced to each other via a gap to arrange a movable electrode 6 and to form a capacitance capacitor composed of the movable electrode 6 and the reference electrode 4. A driving electrode 10 for driving a movable electrode 6 is arranged and fixed to the substrate 3 via a gap against the movable electrode 6. If a distance between the driving electrode 10 and the movable electrode 6 is 2L and twice as long as a distance L between the movable electrode 6 and the reference electrode 4, and an external bias voltage is applied to between the driving electrode 10 and the movable electrode 6 to make the movable electrode 6 bending deform, whereby a displacement range of the movable electrode 6 is increased twice and then a capacitance change rate of a variable capacitance capacitor is increased.</p> |
