发明名称 HERMETIC SEAL SYSTEM AND HERMETIC SEAL METHOD FOR DEVICE
摘要 PROBLEM TO BE SOLVED: To apply pressure to metallic sealing members with the contraction of organic sealants during hardening, by providing a cover installed on the metallic sealing members and the organic sealants, and installing sealing cavity contained in the cover, the metallic sealing members and a base. SOLUTION: A base 36, metallic sealing members 28 and organic sealants 26 which are installed on top edges 37 adjacent to the metallic sealing members 28 are provided. Furthermore, a cover 10 installed above the metallic sealing members 28 and the organic sealants 26 and a hermetic sealing cavity 46 contained in at least the cover 10, the metallic sealing members 28 and the base 36 are provided. The metallic sealing members 28 are compressed between the cover 10 and the base 36, and cavity 46 is sealed. Then, the organic sealants 26 are hardened. Thus, the organic sealants 26 are contracted during hardening, and pressure is added to the metallic sealing members 28. Consequently, the validity of hermetic sealing improves.
申请公布号 JPH08274204(A) 申请公布日期 1996.10.18
申请号 JP19960066778 申请日期 1996.03.22
申请人 TEXAS INSTR INC <TI> 发明人 ROBAATO JIYOSEFU SUCHIIBUN KAIRU
分类号 H01L23/02;H01L21/50;H01L23/04;H01L23/10 主分类号 H01L23/02
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