发明名称 SEMICONDUCTOR LASER
摘要 PURPOSE: To provide a nitride compound semiconductor laser which is excellent in mass-productivity and whereto a current constriction and a waveguide path structure can be fixed readily. CONSTITUTION: After a region wherein an AlN buffer layer 3 or a GaN buffer layer is formed and a region wherein they are not formed are formed on a sapphire substrate 1, crystal growth of a laser structure constituted of nitride compound semiconductor layers 4 to 8 is carried out. Thereby, light confinement and carrier confinement by formation of a self-waveguide path structure can be executed by performing crystal growth for a laser structure constituted of the nitride compound semiconductor layers 4 to 8 on the sapphire substrate 1 wherein a buffer layer is formed along the optical axis alone. As a result, a laser beam whose transverse mode is controlled by low injection carrier density can be obtained.
申请公布号 JPH08274411(A) 申请公布日期 1996.10.18
申请号 JP19950075005 申请日期 1995.03.31
申请人 HITACHI LTD 发明人 UCHIDA KENJI;TANAKA TOSHIAKI;WATANABE AKISADA;MINAGAWA SHIGEKAZU
分类号 H01L33/12;H01L33/14;H01L33/32;H01L33/44;H01S5/00;H01S5/323 主分类号 H01L33/12
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