| 摘要 |
A printing head is disclosed which operates using the coincident forces drop-on-demand printing principles which integrates many nozzles into a single monolithic structure which can be made of silicon. Semiconductor processing methods such as photolithography and chemical etching are used to simultaneously fabricate a multitude of nozzles into the monolithic head. The nozzle are etched through the silicon substrate, allowing two dimensional arrays of nozzles for color printing. The manufacturing process can be based on existing CMOS, nMOS and bipolar semiconductor manufacturing processes, allowing fabrication in existing semiconductor fabrication facilities. Drive transistors, shift registers, and fault tolerance circuitry can be fabricated on the same wafer as the nozzles. Power consumption of the actuators is low compared to other drop-on-demand systems such as thermal ink jet printing, allowing integrated CMOS or nMOS drive circuits to be used. |
