| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for automatically analyzing the surface profile of an element which is in the order of micron or less by a microscope system which is generally supplied to measure an important dimension of the element which is in the order of micro or less. SOLUTION: First, a data point array which is linearly interpolated along a specific scanning line to be measured is generate. A system calculates an angle for rotary correction and rotates the measured profile to an absolute horizontal position from the scanning line. Then, the system separates the scanning line into an independent subset with the feature of wires and that of trenches. Then, the number of features of the wires and the number of features of the trenches are judged. Further, using the data point array, the system calculates the height, width, and angle for each subset feature in the scanning line. |
