| 摘要 |
<p>A monolithic printing head having a nozzle configuration in which the heater element is formed using a self-aligned process, where the thickness of the heater, the width of the heater, and the position of the heater in relation to the nozzle are all determined by deposition and etching steps, instead of lithographic processes. In this manner, much greater control of these parameters can be achieved than is generally possible with lithographic processes. No mask is required for the heater. A print head configuration also provides reduced power requirements and incorporates: (1) the provision of a thermally insulating layer between the heater and the substrate; (2) minimizing the thermal mass of the heater and surrounding solid material; (3) minimizing the distance between the heater and the ink meniscus; (4) using a material of relatively high thermal conductivity to passivate the heater against corrosion by the ink; and (5) undercutting the substrate in the region of the heater. A method of manufacturing such a nozzle and heater configuration is disclosed.</p> |
