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发明名称
摘要
申请公布号
JP2545356(B2)
申请公布日期
1996.10.16
申请号
JP19850500843
申请日期
1985.01.30
申请人
EI TEI ANDO TEI CORP
发明人
KOTSUKUSU HAABAATO MAIKERU
分类号
H01L21/205;C23C16/30;C23C16/46;C30B25/02;C30B25/14;C30B29/40;H01L31/04;H01S5/00;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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