| 摘要 |
<p>A system and method for controlling polarisation state determining parameters of a polarised beam of light in an ellipsometer or polarimeter and the like system, so that they are in ranges wherein the sensitivity, of a sample system characterising PSI and DELTA value monitoring detector (DET) used to measure changes in said polarisation state resulting from interaction with a "composite sample system," comprised of a sample system per se. (SS) and a beam polarisation state determining variable retarder, to noise and measurement errors etc. therein), is reduced. This allows determining sample system per se. characterising PSI and DELTA values, from Composite Sample System characterising PSI and DELTA values, by compensating for the presence of components, (VR1) and/or (VR2), added to an ellipsometer or polarimeter and the like system. The arrangement also improves the ability of an ellipsometer or polarimeter and the like system fitted with components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterising PSI and DELTA determining data values, wherein a sample system per se. investigating polarised beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. The arrangement also allows determination of the "Handedness" of a polarised beam of light, and of sample system Jones or Mueller Matrix component values; and provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter and the like system. <IMAGE></p> |
