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发明名称
摘要
申请公布号
JP2543514(B2)
申请公布日期
1996.10.16
申请号
JP19870031546
申请日期
1987.02.16
申请人
HITACHI LTD
发明人
SUGA TAKU;HAYASHI YOSHIHIKO
分类号
G01R31/28;G01R31/3183;(IPC1-7):G01R31/318
主分类号
G01R31/28
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代理人
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