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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH08269705(A)
申请公布日期
1996.10.15
申请号
JP19950073412
申请日期
1995.03.30
申请人
ULVAC JAPAN LTD
发明人
YAMAMOTO NAOSHI;MORITA TADASHI;KURAUCHI TOSHIHARU;HAKOMORI MUNEHITO;MISAWA SHUNJI;MATSUURA MASAMICHI
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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