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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH08269709(A)
申请公布日期
1996.10.15
申请号
JP19950094284
申请日期
1995.03.28
申请人
BRIDGESTONE CORP;KOINUMA HIDEOMI
发明人
KOINUMA HIDEOMI;KAWA KENKEN;KUSANO YUKIHIRO;NAITO TOSHIO
分类号
H05H1/46;C23C14/34;(IPC1-7):C23C14/34
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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