| 摘要 |
PURPOSE:To conduct uniform and good-quality development on the respective substrates by uniformly supplying the same amt. of good-quality developer on each substrate under the same conditions at all times. CONSTITUTION:A developer outlet 5 having plural nozzles 52 for gently discharging a developer on the surface of a substrate S and a developer feed line 6 including a fixed delivery pump 63 to feed the developer to the outlet 5 are provided to the device. The arrival of the substrate S at the position below the outlet 5 is detected by a sensor 8, the signal is transmitted to a control part 7, the substrate S is stopped by the control part 7, and a solenoid valve 65 is opened to deliver the developer and closed after a specified time. Otherwise, the positions below the nozzles 52 are centrosymmetrically arranged around the center of the substrate S to improve uniformity. |
