| 发明名称 |
PRODUCTION OF PIEZOELECTRIC SUBSTARATE FOR ELASTIC SURFACE WAVES |
| 摘要 |
PURPOSE:To prevent the warpage of a substrate and improve characteristics by finishing both surfaces thereafter applying chemcial etching to desired surface accuracy only to one surface, in a ceramic piezoelectric substrate. |
| 申请公布号 |
JPS5376781(A) |
申请公布日期 |
1978.07.07 |
| 申请号 |
JP19760151936 |
申请日期 |
1976.12.20 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MASHITA MASAO |
| 分类号 |
H03H3/08;H01L41/22;H03H3/00;H03H9/00 |
主分类号 |
H03H3/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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