| 摘要 |
An ion energy analyzer having a micro-channel plate where the geometric filtering characteristics of the micro-channel plate are electrically controlled. The ion energy analyzer contains a metallic collector, a control grid and a micro-channel plate, all formed into a cylindrical stack where the collector, control grid and micro-channel plate are separated by ceramic insulating washers. A control element is formed within each aperture of the micro-channel plate for controlling a critical angle of each aperture. A voltage is applied to the control element such that an electric field is generated within each micro-channel. By varying the magnitude of the electric field, the critical angle of the micro-channel plate can be electrically controlled, and as such, certain ion trajectories can be selected for entry into the ion energy analyzer.
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