| 摘要 |
<p>PURPOSE: To provide a baggage storage device provided with a substrate assorting unit which can be operated without human intervention and can improve yield. CONSTITUTION: This device is provided with a base assortment stage on which a full cassette 3A receiving a plurality of substrates of different type from the base assortment is loaded, a loading bed 23 provided with a plurality of assorting stages of different types on which cassettes 3B of assortment of types are loaded, a transfer robot 25 classifying glass substrates into the empty cassettes based on the information of each substrate, a shelf 4 stocking the cassettes 3 and a loading-and-unloading device 11 supplying the full cassettes 3A and the empty cassettes 3B to each stage of the loading bed 23. Since this construction can eliminate an operator and automate the handling of the cassettes 3 of the glass substrate, the breakage of the glass substrates by an operator can be null and the information of the glass substrates and the cassettes 3 can be automatically controlled.</p> |
