| 摘要 |
PURPOSE: To obtain a highly precise thick film as a high-strength structural material at the time of utilizing a photoresist as an electroforming mask by using a mask formed by projecting and removing a resist with a laser beam. CONSTITUTION: A thick polymer film 2 is thermocompression-bonded or adhered onto a substrate 1. A laser beam 4 from an excimer laser device is shaped with a homogenizer lens, passed through a laser beam mask and projected on the substrate 1. The polymer film 2 on the substrate 1 is abraded off by the laser beam 4. Since the substrate 1 is placed on the X, Y and Z stages of a laser-beam machine, a wide pattern is coped with by scanning the stages. A laser mask is changed in machining in accordance with the pattern. After the pattern is formed, electroforming is conducted, and a high-precision and thick electroformed article 9 is obtained. A corrosion-resistant film is preferably formed at the same time that the mask is removed. |
