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发明名称
DEVICE FOR PRODUCING SEMICONDUCTOR DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08269716(A)
申请公布日期
1996.10.15
申请号
JP19950075120
申请日期
1995.03.31
申请人
NEC CORP
发明人
YOSHIIE MASANOBU
分类号
C23C16/04;C23C16/44;H01L21/205;H01L21/285;H01L21/31;H01L21/3205;(IPC1-7):C23C16/04
主分类号
C23C16/04
代理机构
代理人
主权项
地址
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