发明名称 MANUFACTURE OF PRESSURE SENSOR
摘要 <p>PROBLEM TO BE SOLVED: To make it possible to airtightly couple a ceramic molded member and a ceramic plate by a method wherein the ceramic plate is used for a film, a recessed part is provided on the ceramic molded member for standard capacity, the recessed part is closed by the ceramic molded member and the ceramic plate. SOLUTION: The ceramic paste, which is arranged on the surface of a ceramic molded member 2, is not surrounded a recessed part completely, and there is a gap. The gas contained in the recessed part goes out from the gap 7 when a firing process is performed. The glass contained in thick film paste is liquefied at the highest temperature attained by the final firing stage, and the liquefied glass is arranged between a ceramic substrate 1 and the surface of the ceramic molded member 2. At that time, glass material reaches the region of the gap 7 in the fluidization process, and the recessed part 4 is airtightly sealed. The airtight closing of the recessed part 4 and the coupling of the ceramic member 2 and the ceramic plate 1 can be accomplished by a process.</p>
申请公布号 JPH08264809(A) 申请公布日期 1996.10.11
申请号 JP19960056334 申请日期 1996.03.13
申请人 ROBERT BOSCH GMBH 发明人 URURITSUHI GEEBERU;ANDOREASU TOOME;YURUGEN SHIYUBUAIGAA;RORUFU BETSUKAA;ANDOREASU FUITSUSHIYAA
分类号 G01L7/00;G01L7/08;G01L9/00;G01L9/04;G01L19/00;H01L29/84;(IPC1-7):H01L29/84 主分类号 G01L7/00
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