PIEZORESISTANCE SENSOR AND METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoresistive pressure sensor which does not require any tap and is not affected by the mismatching of a mask. SOLUTION: A piezoresistive pressure sensor 30 is provided with four resistance diffusion regions 32 which are connected to a bridge structure 33 with four joint parts 36. Each of the diffusion region is provided with a first edge part connected to one of four junction parts and a second edge part which is connected to another one of four junction parts. Four contact diffusion terminals 34 are arranged in contact with a bridge structure. Each diffusion terminal 34 is arranged at one of four junction parts and the diffusion region is electrically connected only by the contact diffusion terminals essentially. Therefore, a tap for electrically connecting the contact diffusion terminals 34 to the resistance diffusion region of the bridge is unnecessary, thus enhancing sensor sensitivity.