| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistor device which is capable of obtaining a minimum TCR. SOLUTION: A resistor device is composed of one or more resistive films and can be formed on a board, where at least one of the resistive films contains CrSi as a main component, and the resistive thin film whose main component is CrSi is composed of 5 to 50% of Cr, 10 to 70% of Si, 5 to 70% of O, and 1 to 50% of one element selected out of B, C, and N. |
