| 摘要 |
<p>PURPOSE: To provide a cold electron emitting element which has an emitter where the apex angle of the tip is small and the tip is sharp and small. CONSTITUTION: A silicon substrate 11, where a reverse pyramid type recess 15 consisting of four side faces in (111) face azimuth is made in advance, is soaked in hydrofluoric acid solution. Next, the silicon substrate is scratchedly processed in acetone solution containing diamond fine powder, by ultrasonic vibration method, and then the silicon substrate 11 is soaked and anisotropically etched in tetramethyl ammonium hydroxide solution so as to form sharpened reverse pyramid type recesses 21. Diamond being emitter material 16 is made in the sharpened reverse pyramid type recess 21 by chemical vapor growth method, and than the silicon substrate 11 is removed, thus an emitter 17 for a cold electron emitting element, which has a sharp tip 22, is manufactured.</p> |
