| 摘要 |
PURPOSE: To provide a free access cassette loader capable of transferring a cassette at a high speed without having wafers being jumped out of the cassette. CONSTITUTION: A free access cassette loader transfers cassettes 1 between a cassette stage 3 and a cassette rack 2. A holder 7 for supporting a cassette 1 is supported on a rotating part 8 in such a way that the holder 7 is rotatable. Thus, when transferred, a cassette is rotated and tilted to prevents wafers from being jumped out thereof, which allows the cassette to be transferred at a high speed. |
