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发明名称
PHOTOSENSITIVE ORGANIC/INORGANIC COMPLEX COMPOSITION, ITS PRODUCTION, AND PHOTORESIST CONSISTING OF THIS COMPOSITION
摘要
申请公布号
JPH08262700(A)
申请公布日期
1996.10.11
申请号
JP19950093200
申请日期
1995.03.28
申请人
KANSAI SHINGIYUJIYUTSU KENKYUSHO:KK
发明人
SHIYUU TOKUGEN
分类号
G03F7/004;C08L101/00;G03F7/027;G03F7/032;G03F7/075;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
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