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发明名称
ION SOURCE
摘要
申请公布号
JPH08264143(A)
申请公布日期
1996.10.11
申请号
JP19950064352
申请日期
1995.03.23
申请人
NISSIN ELECTRIC CO LTD
发明人
SENOO KAZUHIRO;TANJIYOU MASAYASU
分类号
H01J27/04;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/04
代理机构
代理人
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地址
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UMBRELLA
