| 摘要 |
PURPOSE: To correct the positional deviation of a dummy wafer at the time of conveying the wafer or mounting it on a boat. CONSTITUTION: When a carrier 12 in which a dummy wafer 15 is contained in a horizontal attitude is carried on a boat 1 of a vertical attitude and the boat 1 is rotated toward the horizontal attitude, the wafer 15 contained in the carrier 12 is returned to the original position (the bottom of the carrier 12) by its own weight, and hence the positional deviation can be corrected. |
