摘要 |
PROBLEM TO BE SOLVED: To attempt improving of crystal quality by having a first lattice constant comprised of nitrous indium and gallium compound, a buffer layer with a first indium containing volume and a second lattice constant and a second indium upper layer and by specifying a difference of the first and the second lattice constants. SOLUTION: Increasing of indium containing volume in a DH construction 16 is made possible by introducing indium into a buffer layer 12. A difference of indium containing volume in the buffer layer 12 and indium containing volume in an active layer 16A is preferable less 20%. As a result a lattice constant of the DH construction 16 matches better with a lattice constant of the buffer layer 12. When the indium containing volume in the active layer 16A becomes equal to the indium containing volume in the buffer layer 12, the lattice constants match better. If the difference of the lattice constant in the buffer layer 12 and the lattice constant in the DH construction 16 can be reduced less than a tolerance of ±0.5%, crystal quality of the DH construction 16 can be improved. |