| 摘要 |
PURPOSE: To improve heat resistance of an X-ray taking-out aperture by manufacturing a supporting member of the X-ray taking-out aperture with a material of high heat conductivity such as copper, and further, providing the supporting member with a cooling means so that the X-ray taking-out aperture is cooled through the supporting member. CONSTITUTION: A square-snout pipe 3 is replaced with copper and silver, etc., of good heat conductivity. A cooling water pipe 5 is placed at the root of the square-snout pipe 3. This is because the tip of the square-snout pipe 3 deeply gets into as exposure device so that there is no space for placing the cooling pipe. Heat is generated when SR light transmits through a beryllium foil 4, however, heat conductivity of copper is 2-3 times higher than that of stainless, so that the heat generated at the beryllium foil 4 is absorbed at the root of the square-snout pipe 3. Further, since the temperature of the beryllium foil 4 drops with lowering in temperature of a cooling medium, the X-ray intensity that allows transmission there can be made higher. |
