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发明名称
CLEANER FOR CHARGED PARTICLE
摘要
申请公布号
JPH08264501(A)
申请公布日期
1996.10.11
申请号
JP19950086131
申请日期
1995.03.17
申请人
NEC CORP
发明人
SASAKI NORINAGA
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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